With the rapid development of the semiconductor industry, factory safety design, especially the planning and implementation of explosion-proof zoning, has become a topic of great concern in the industry. This article will discuss in detail the core elements of explosion-proof zoning design for semiconductor factories, with a particular focus on analyzing the design requirements and practices for explosion vents, tethering cables, fire-resistant and blast-resistant walls, and fire-resistant and blast-resistant doors, providing comprehensive and professional reference for the industry.
Explosion Venting Design
Explosion venting design is an indispensable part of the explosion-proof system, requiring precise calculations and systematic consideration. According to FM 1-44 standard, GB55037 building fire protection code, and practical application experience, the following key elements need to be considered in explosion venting design:
- Basic explosion venting pressure: 0.96kPa
- Weight limit for vent panels:
- FM1-44 standard recommendation: not exceeding 3lb/ft2 (14.6 kg/m2)
- Considering fire resistance requirements: allowed up to 8lb/ft2 (39 kg/m2)
- Wind speed factor: adjusted based on FM RoofNav calculation results
- Fire resistance requirements:
- Explosion venting wall (non-load-bearing exterior wall): 1-hour fire resistance
- Explosion venting roof: 0.5-hour fire resistance
Material Selection and Application
Rockwool Sandwich Panels
- Used in conjunction with explosion vent fasteners, currently a common FM-certified solution for explosion venting roofs and walls in China
- Advantages: significant economic benefits, mature waterproofing technology, strong multifunctionality, easy installation
- Application: suitable for large-area roof and exterior wall explosion venting design
- Fire resistance performance: can choose products meeting 1-hour (wall) or 0.5-hour (roof) fire resistance requirements
Explosion Vent Fasteners
- Combined with rockwool sandwich panels to ensure effective pressure release in case of explosion
- Components: including vent gaskets, vent screws, positioning sleeves
- Technical specifications:
- Vent gasket breaking force: standard value 700N, FM certified
- Static pressure design range for venting: 0.96 to 1.92kPa
Note:
- When the venting area is insufficient, explosion venting doors and windows can be added to meet national standards and FM requirements.
- It is not recommended to use full-surface explosion venting windows design due to high cost and potential water leakage issues, resulting in high maintenance costs.
Wind Speed Consideration
When determining the explosion venting pressure value, local wind speed conditions must be considered to avoid damage to the venting structure in extreme weather:
- Calculate local wind pressure values according to FM RoofNav and GB50009 building structure load code.
- Choose the larger value as the minimum design parameter.
Tethering Cable DesignTethering cables are used to prevent explosion vent panels from completely detaching in emergency situations. FM1-44 specifies the following layout and structural practices for tethering cables:
- Material: SUS304 stainless steel
- Specifications: 6mm diameter, 900mm length, breaking force exceeding 20kN
- Layout: Two cables used for every panel section 3 feet (0.9 meters) wide and 15 feet (4.6 meters) high, different from the national standard’s panel end layout method
Fire-Resistant and Blast-Resistant Wall Design
- Material: Composite steel panels recommended to meet both fire resistance and blast resistance requirements
- Fire resistance performance: CNAS certified, fire resistance not less than 4 hours, blast resistance not less than 300kPa
- Blast-resistant design: Structural frame design pressure not less than 4.8kPa
- Structural design must meet both FM1-44 and GB50779 standards for structural dynamic calculation requirements, with calculation explanations provided
Fire-Resistant and Blast-Resistant Door Design
- Material: Composite blast-resistant steel panels recommended, combining fire resistance and blast resistance properties
- Fire resistance and blast resistance performance: Can achieve Class A 1.5-hour fire resistance rating and pass CNAS explosion test certification
- Blast-resistant design: Design pressure not less than 300kPa
Fire-Resistant and Blast-Resistant Rolling Shutter Design
- Material: Steel plates recommended to meet fire resistance and blast resistance requirements
- Fire resistance and blast resistance performance: Can achieve Class A 3-hour fire resistance rating and pass CNAS explosion test certification
- Blast-resistant design: Design pressure not less than 1000kPa
Conclusion
The explosion-proof zoning design for semiconductor factories is a technically complex and crucial task. Through precise design of explosion vent fasteners, tethering cables, and fire-resistant and blast-resistant walls, and strict adherence to FM Global and national standards, combined with the latest composite steel panel technology, the overall safety performance of factories can be greatly improved. At the same time, the design process needs to balance the effects of explosion venting and fire resistance, choosing the most appropriate solutions. As a leading provider of comprehensive fire compartmentation solutions in the industry, Shanghai Tengxi Construction Engineering will continue to be dedicated to providing safer and more reliable explosion-proof solutions for the semiconductor industry, promoting the safe development of the industry.